Ethylenediamine pyrocatechol

Ethylenediamine pyrocatechol (EDP), also known as ethylenediamine-pyrocatechol-water (EPW), is an anisotropic etchant solution for silicon.[1] A typical formulation consists of ethylenediamine, pyrocatechol, pyrazine and water. It is carcinogenic and very corrosive.[1] It is mainly used in research labs, and is not used in mainstream semiconductor fabrication processes.[1]

References
  1. Microfabrication:Wet-Etching, University of Washington, College of Engineering
This article is issued from Wikipedia. The text is licensed under Creative Commons - Attribution - Sharealike. Additional terms may apply for the media files.